JPH0623567Y2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JPH0623567Y2
JPH0623567Y2 JP1988011553U JP1155388U JPH0623567Y2 JP H0623567 Y2 JPH0623567 Y2 JP H0623567Y2 JP 1988011553 U JP1988011553 U JP 1988011553U JP 1155388 U JP1155388 U JP 1155388U JP H0623567 Y2 JPH0623567 Y2 JP H0623567Y2
Authority
JP
Japan
Prior art keywords
substrate
heater
film forming
reaction chamber
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988011553U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01119057U (en]
Inventor
啓文 江島
敦司 渡辺
永 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1988011553U priority Critical patent/JPH0623567Y2/ja
Publication of JPH01119057U publication Critical patent/JPH01119057U/ja
Application granted granted Critical
Publication of JPH0623567Y2 publication Critical patent/JPH0623567Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP1988011553U 1988-01-30 1988-01-30 成膜装置 Expired - Lifetime JPH0623567Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988011553U JPH0623567Y2 (ja) 1988-01-30 1988-01-30 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988011553U JPH0623567Y2 (ja) 1988-01-30 1988-01-30 成膜装置

Publications (2)

Publication Number Publication Date
JPH01119057U JPH01119057U (en]) 1989-08-11
JPH0623567Y2 true JPH0623567Y2 (ja) 1994-06-22

Family

ID=31220208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988011553U Expired - Lifetime JPH0623567Y2 (ja) 1988-01-30 1988-01-30 成膜装置

Country Status (1)

Country Link
JP (1) JPH0623567Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4704250B2 (ja) * 2006-03-09 2011-06-15 大日本印刷株式会社 金属酸化物膜の製造方法、および、金属酸化物膜の製造装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938375A (ja) * 1982-08-26 1984-03-02 Canon Inc プラズマｃｖｄ装置
JPS6063370A (ja) * 1983-09-16 1985-04-11 Hitachi Koki Co Ltd アモルファス水素化シリコン膜製造装置

Also Published As

Publication number Publication date
JPH01119057U (en]) 1989-08-11

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